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Hurukuro pamusoro peUV Wafer Mwenje Kudzima

Mucheka wakagadzirwa nesilicon yakachena (Si). Kazhinji yakakamurwa kuita 6-inch, 8-inch, uye 12-inch yakatarwa, wafer inogadzirwa zvichibva pane iyi wafer. Silicon wafers akagadzirirwa kubva kumusoro-kuchena semiconductors kuburikidza nemaitiro akadai sekristaro kudhonza uye kucheka anonzi wafers beca.shandisa dzine denderedzwa muchimiro. Akasiyana siyana edunhu maumbirwo anogona kugadziriswa pasilicon wafers kuti ave zvigadzirwa zvine chaiwo magetsi emagetsi. zvinoshanda zvakabatanidzwa redunhu zvigadzirwa. Wafers anoenda kuburikidza neakatevedzana semiconductor yekugadzira maitiro kuti aumbe zvakanyanya diki redunhu zvimiro, obva achekwa, akaiswa mukati, uye akaedzwa kuita machipisi, ayo anoshandiswa zvakanyanya mumhando dzakasiyana dzemagetsi. Wafer zvinhu zvakasangana neanopfuura makore makumi matanhatu ekushanduka kwetekinoroji uye kusimudzira maindasitiri, kuumba mamiriro eindasitiri ayo anotongwa nesilicon uye anowedzerwa nezvinhu zvitsva zvesemiconductor.

80% yenharembozha nemakomputa epasi rose anogadzirwa muChina. China inovimba nekutenga kunze kwenyika nechikamu che95% chemhando yepamusoro-soro, saka China inoshandisa US$220 bhiriyoni gore rega rega kuunza machipisi, inova yakapetwa kaviri kutengwa kwemafuta pagore. Zvese zvishandiso uye zvinhu zvine chekuita nephotolithography michina uye chip kugadzirwa zvakavharwa zvakare, senge wafers, yakakwirira-kuchena simbi, etching michina, nezvimwe.

Nhasi tichataura muchidimbu nezve musimboti wekudzima mwenje weUV wemashini ewafer. Paunenge uchinyora data, zvinodikanwa kupinza charge mugedhi rinoyangarara nekuisa yakakwira voltage VPP kugedhi, sezvakaratidzwa mumufananidzo uri pazasi. Sezvo jekiseni rejekiseni risina simba rekupinda mumadziro emagetsi esilicon oxide firimu, inogona chete kuchengetedza mamiriro ezvinhu, saka tinofanira kupa mutero humwe huwandu hwesimba! Apa ndipo panodiwa ultraviolet chiedza.

sav (1)

Kana gedhi rinoyangarara ragamuchira ultraviolet irradiation, maerekitironi ari pagedhi rinoyangarara anogamuchira simba reultraviolet light quanta, uye maerekitironi anova maerekitironi anopisa ane simba rekupinza simba remadziro esilicon oxide film. Sezvinoratidzwa mumufananidzo, maerekitironi anopisa anopinda mufirimu resilicon oxide, anoyerera achienda kune substrate uye gedhi, uye anodzokera kune yakadzimwa. Basa rekudzima rinogona kuitwa chete nekugamuchira ultraviolet irradiation, uye haigone kudzimwa nemagetsi. Mune mamwe mazwi, nhamba yebhiti inogona kungoshandurwa kubva ku "1" kuenda ku "0", uye mune yakapesana. Hapana imwe nzira kunze kwekudzima zvese zviri mukati meiyo chip.

sav (2)

Tinoziva kuti simba rechiedza rakapesana neresairi rechiedza. Kuti maerekitironi ave maerekitironi anopisa uye nokudaro ave nesimba rokupinda mufirimu reoxide, kupenya kwechiedza nehupfupi hwewavelength, ndiko kuti, mwaranzi yeultraviolet, inodiwa zvikuru. Sezvo nguva yekudzima inoenderana nehuwandu hwemafotoni, nguva yekudzima haigone kupfupikiswa kunyangwe papfupi mafungu. Kazhinji, kudzima kunotanga kana wavelength iri kutenderera 4000A (400nm). Iyo inosvika pakuzara kutenderedza 3000A. Pazasi pe3000A, kunyangwe iyo wavelength ipfupi, haizove nemhedzisiro panguva yekudzima.

Chiyero chekudzima kweUV chinowanzo gamuchira ultraviolet mwaranzi ine chaiyo wavelength ye253.7nm uye kusimba kwe ≥16000 μ W / cm². Iyo erasure Operation inogona kupedzwa nekuratidzwa nguva kubva pamaminitsi makumi matatu kusvika kumaawa matatu.


Nguva yekutumira: Zvita-22-2023